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Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm Conference paper
Huang C.-H., Tsai M.-H., Lee C.-H., Hsieh T.-M., Liou J.-C., Chen L.-C., Yip M.-C., Fang W.. Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm[C], 2011, 1026-1029.
Authors:  Huang C.-H.;  Tsai M.-H.;  Lee C.-H.;  Hsieh T.-M.;  Liou J.-C.; et al.
Favorite | TC[Scopus]:2 | Submit date：2019/04/08
Cmos-mems  Condenser Microphone  Corrugated  Diaphragm  Sensitivity  
Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate Journal article
Huang C.-H., Lee C.-H., Hsieh T.-M., Tsao L.-C., Wu S., Liou J.-C., Wang M.-Y., Chen L.-C., Yip M.-C., Fang W.. Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate[J]. Sensors, 2011, 11(6), 6257-6269.
Authors:  Huang C.-H.;  Lee C.-H.;  Hsieh T.-M.;  Tsao L.-C.;  Wu S.; et al.
Favorite | TC[WOS]:34 TC[Scopus]:38 | Submit date：2019/04/08
Cmos-mems  Condenser Microphone  Corrugated  Diaphragm  Sensitivity