Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm

doi:10.1109/TRANSDUCERS.2011.5969162

Residential College	false
Status	已發表Published
	Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm
	Huang C.-H.1; Tsai M.-H.1; Lee C.-H.3; Hsieh T.-M.3; Liou J.-C.3; Chen L.-C.2; Yip M.-C.1; Fang W.1
	2011-09-01
Conference Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Source Publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1026-1029
Conference Date	5 June 2011through 9 June 2011
Conference Place	Beijing, China
Abstract	This study reports a CMOS-MEMS condenser microphone implemented using the standard thin films stacking of 0.35m UMC CMOS 3.3/5.0V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, silicon substrate is employed to increase the stiffness of back-plate. Measurements show the sensitivity of microphone is 423dBV/Pa at 1kHz under 6V pumping voltage, the frequency response is 100Hz-10kHz, and the S/N ratio 55dB. Table1 summarizes detail specifications. © 2011 IEEE.
Keyword	Cmos-mems Condenser Microphone Corrugated Diaphragm Sensitivity
DOI	10.1109/TRANSDUCERS.2011.5969162
URL	View the original
Language	英語English
Scopus ID	2-s2.0-80052128742
Fulltext Access	View Full-Text via DOI View Full-Text via Scopus
Citation statistics
Document Type	Conference paper
Collection	University of Macau
Affiliation	1.National Tsing Hua University 2.United Microelectronics Corporation Taiwan 3.Solid State System Corporation (3S)
Recommended Citation GB/T 7714	Huang C.-H.,Tsai M.-H.,Lee C.-H.,et al. Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm[C], 2011, 1026-1029.
APA	Huang C.-H.., Tsai M.-H.., Lee C.-H.., Hsieh T.-M.., Liou J.-C.., Chen L.-C.., Yip M.-C.., & Fang W. (2011). Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 1026-1029.

Files in This Item:
There are no files associated with this item.

If you have any objections to this item, please fill out the form below and the administrator will contact you as soon as possible.
Content:
Email：	*
Affiliation No.
Verification Code:	Refresh

Any comments and suggestions are welcomed.
Title:	*
Content:
Email：	*
Verification Code:	Refresh