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Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate
Huang C.-H.1; Lee C.-H.3; Hsieh T.-M.3; Tsao L.-C.3; Wu S.3; Liou J.-C.3; Wang M.-Y.2; Chen L.-C.2; Yip M.-C.1; Fang W.1
2011-06-01
Source PublicationSensors
ISSN14248220
Volume11Issue:6Pages:6257-6269
Abstract

This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 μm UMC CMOS 3.3/5.0 V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, a silicon substrate is employed to increase the stiffness of the back-plate. Measurements show the sensitivity of microphone is -42 ± 3 dBV/Pa at 1 kHz (the reference sound-level is 94 dB) under 6 V pumping voltage, the frequency response is 100 Hz-10 kHz, and the S/N ratio >55 dB. It also has low power consumption of less than 200 μA, and low distortion of less than 1% (referred to 100 dB). © 2011 by the authors; licensee MDPI, Basel, Switzerland.

KeywordCmos-mems Condenser Microphone Corrugated Diaphragm Sensitivity
DOI10.3390/s110606257
URLView the original
Language英語English
WOS IDWOS:000292026400043
Scopus ID2-s2.0-79959853200
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Citation statistics
Document TypeJournal article
CollectionUniversity of Macau
Affiliation1.National Tsing Hua University
2.United Microelectronics Corporation Taiwan
3.Solid State System Corporation (3S)
Recommended Citation
GB/T 7714
Huang C.-H.,Lee C.-H.,Hsieh T.-M.,et al. Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate[J]. Sensors, 2011, 11(6), 6257-6269.
APA Huang C.-H.., Lee C.-H.., Hsieh T.-M.., Tsao L.-C.., Wu S.., Liou J.-C.., Wang M.-Y.., Chen L.-C.., Yip M.-C.., & Fang W. (2011). Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate. Sensors, 11(6), 6257-6269.
MLA Huang C.-H.,et al."Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate".Sensors 11.6(2011):6257-6269.
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