Residential College | false |
Status | 已發表Published |
Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate | |
Huang C.-H.1; Lee C.-H.3; Hsieh T.-M.3; Tsao L.-C.3; Wu S.3; Liou J.-C.3; Wang M.-Y.2; Chen L.-C.2; Yip M.-C.1; Fang W.1 | |
2011-06-01 | |
Source Publication | Sensors |
ISSN | 14248220 |
Volume | 11Issue:6Pages:6257-6269 |
Abstract | This study reports a CMOS-MEMS condenser microphone implemented using the standard thin film stacking of 0.35 μm UMC CMOS 3.3/5.0 V logic process, and followed by post-CMOS micromachining steps without introducing any special materials. The corrugated diaphragm for the microphone is designed and implemented using the metal layer to reduce the influence of thin film residual stresses. Moreover, a silicon substrate is employed to increase the stiffness of the back-plate. Measurements show the sensitivity of microphone is -42 ± 3 dBV/Pa at 1 kHz (the reference sound-level is 94 dB) under 6 V pumping voltage, the frequency response is 100 Hz-10 kHz, and the S/N ratio >55 dB. It also has low power consumption of less than 200 μA, and low distortion of less than 1% (referred to 100 dB). © 2011 by the authors; licensee MDPI, Basel, Switzerland. |
Keyword | Cmos-mems Condenser Microphone Corrugated Diaphragm Sensitivity |
DOI | 10.3390/s110606257 |
URL | View the original |
Language | 英語English |
WOS ID | WOS:000292026400043 |
Scopus ID | 2-s2.0-79959853200 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | University of Macau |
Affiliation | 1.National Tsing Hua University 2.United Microelectronics Corporation Taiwan 3.Solid State System Corporation (3S) |
Recommended Citation GB/T 7714 | Huang C.-H.,Lee C.-H.,Hsieh T.-M.,et al. Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate[J]. Sensors, 2011, 11(6), 6257-6269. |
APA | Huang C.-H.., Lee C.-H.., Hsieh T.-M.., Tsao L.-C.., Wu S.., Liou J.-C.., Wang M.-Y.., Chen L.-C.., Yip M.-C.., & Fang W. (2011). Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate. Sensors, 11(6), 6257-6269. |
MLA | Huang C.-H.,et al."Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate".Sensors 11.6(2011):6257-6269. |
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