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Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer
Journal article
Li, Fangzheng, Liu, Dandan, Gao, Le, Cai, Bingyang, Yang, Lujia, Wang, Yuan, Zhao, Chun, Wu, Wenjie, Tu, Liangcheng. Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer[J]. Journal of Microelectromechanical Systems, 2024, 33(1), 12-20.
Authors:
Li, Fangzheng
;
Liu, Dandan
;
Gao, Le
;
Cai, Bingyang
;
Yang, Lujia
; et al.
Favorite
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TC[WOS]:
0
TC[Scopus]:
0
IF:
2.5
/
2.6
|
Submit date:2024/02/22
Area-changed Capacitor
Electrostatic Actuator
Force-balance
Low Noise
Mems Accelerometer
On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation
Journal article
Li, Chengxin, Quan, Aojie, Zhang, Hemin, Wang, Chen, Wang, Linlin, Mert Torunbalci, Mustafa, Wang, Yuan, Kraft, Michael. On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation[J]. Journal of Microelectromechanical Systems, 2024, 33(5), 568-576.
Authors:
Li, Chengxin
;
Quan, Aojie
;
Zhang, Hemin
;
Wang, Chen
;
Wang, Linlin
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
IF:
2.5
/
2.6
|
Submit date:2024/11/05
Dynamic Range
Nonlinear Effects
Nonlinearity Compensation
Resonant Accelerometer
Signal-to-noise Ratio
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation
Journal article
Jingqian Xi, Lei Xu, Yuan Wang, Huafeng Liu, Xingyin Xiong, Xudong Zou, Chengxin Li, Fangjing Hu, Chen Wang, Michael Kraft, Chun Zhao. Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation[J]. Journal of Microelectromechanical Systems, 2023, 32(5), 426 - 436.
Authors:
Jingqian Xi
;
Lei Xu
;
Yuan Wang
;
Huafeng Liu
;
Xingyin Xiong
; et al.
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TC[WOS]:
6
TC[Scopus]:
6
IF:
2.5
/
2.6
|
Submit date:2023/08/03
Blue-sideband Excitation
Cross-sensitivity Suppression
Micromechanical Devices
Multiple Parameter Decoupling
Resonant Frequency
Resonant Mems Sensors
Sensitivity
Sensors
Temperature Measurement
Temperature Sensors
Vibrations
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor
Journal article
Wang,Chenxi, Wang,Chen, Xia,Benzheng, Zhang,Hemin, Matavz,Aleksander, Wang,Yuan, Quan,Aojie, Wang,Linlin, Arnauts,Giel, Tu,Min, Ameloot,Rob, Kraft,Michael. A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor[J]. Journal of Microelectromechanical Systems, 2023, 32(4), 371 - 380.
Authors:
Wang,Chenxi
;
Wang,Chen
;
Xia,Benzheng
;
Zhang,Hemin
;
Matavz,Aleksander
; et al.
Favorite
|
TC[WOS]:
6
TC[Scopus]:
6
IF:
2.5
/
2.6
|
Submit date:2023/08/03
Zif-8
Coupled Resonant Sensor
Reversible Detection
Enhanced Sensitivity
Gas Sensing
Optimization of MEMS Vibration Energy Harvester with Perforated Electrode
Journal article
Luo, Anxin, Zhang, Yulong, Guo, Xinge, Lu, Yan, Lee, Chengkuo, Wang, Fei. Optimization of MEMS Vibration Energy Harvester with Perforated Electrode[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021, 30(2), 299-308.
Authors:
Luo, Anxin
;
Zhang, Yulong
;
Guo, Xinge
;
Lu, Yan
;
Lee, Chengkuo
; et al.
Favorite
|
TC[WOS]:
14
TC[Scopus]:
17
IF:
2.5
/
2.6
|
Submit date:2021/12/07
Air Damping
Energy Harvesting
Microelectromechanical Systems (Mems)
Perforated Electrode
Visual servo feedback control of a novel large working range micro manipulation system for microassembly
Journal article
Xiao S., Li Y.. Visual servo feedback control of a novel large working range micro manipulation system for microassembly[J]. Journal of Microelectromechanical Systems, 2014, 23(1), 181.
Authors:
Xiao S.
;
Li Y.
Favorite
|
TC[WOS]:
40
TC[Scopus]:
49
|
Submit date:2018/10/30
Electromagnetic Actuator
Flexure Hinges
Micro Manipulation
Micro-assembly
Visual Servo Feedback Control