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A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor
Wang,Chenxi1; Wang,Chen1; Xia,Benzheng2; Zhang,Hemin1; Matavz,Aleksander2; Wang,Yuan3; Quan,Aojie1; Wang,Linlin1; Arnauts,Giel2; Tu,Min4; Ameloot,Rob2; Kraft,Michael1
2023-05-09
Source PublicationJournal of Microelectromechanical Systems
ISSN1057-7157
Volume32Issue:4Pages:371 - 380
Abstract

In this work, a zeolitic imidazolate framework-8 (ZIF-8)-coated coupled resonant sensor was fabricated using a solvent-free method. The solvent-free method avoids the use of solvents for ZIF-8 synthesis, which eliminates the risk of device contamination, corrosion, or destruction. This process enables batch fabrication of ZIF-8-coated coupled resonators at wafer level. By tracking shifts in frequency and amplitude ratio, the sensor demonstrates strong responses to ethanol vapor of different concentrations and exhibits good reversible detection ability. The normalized sensitivity using amplitude ratio shift as an output metric is $6.06\times10$ $^{\mathbf{-3}}$ at low ethanol vapor concentrations (2%-7.5%), which is nearly six times that using frequency shift ( $1.06\times10$ $^{\mathbf{-3}}$ ). For higher ethanol vapor concentrations (10%-60%), the normalized sensitivity using amplitude ratio shift is $2.66\times10$ $^{\mathbf{-3}}$ , almost 40 times that using frequency shift ( $6.73\times10$ $^{\mathbf{-5}}$ ). Given the significantly enhanced sensitivity, the ZIF-8-coated coupled resonant sensor shows promising potential for ultra-sensitive gas sensing.

KeywordZif-8 Coupled Resonant Sensor Reversible Detection Enhanced Sensitivity Gas Sensing
DOI10.1109/JMEMS.2023.3272210
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS IDWOS:000988488000001
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141
Scopus ID2-s2.0-85159847941
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Citation statistics
Document TypeJournal article
CollectionTHE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU)
INSTITUTE OF MICROELECTRONICS
Corresponding AuthorWang,Chen; Zhang,Hemin
Affiliation1.Department of Electrical Engineering (ESAT)-MNS, KU Leuven, Leuven, Belgium
2.Department of Chemical Engineering, KU Leuven, Leuven, Belgium
3.Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Taipa, China
4.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
Recommended Citation
GB/T 7714
Wang,Chenxi,Wang,Chen,Xia,Benzheng,et al. A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor[J]. Journal of Microelectromechanical Systems, 2023, 32(4), 371 - 380.
APA Wang,Chenxi., Wang,Chen., Xia,Benzheng., Zhang,Hemin., Matavz,Aleksander., Wang,Yuan., Quan,Aojie., Wang,Linlin., Arnauts,Giel., Tu,Min., Ameloot,Rob., & Kraft,Michael (2023). A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor. Journal of Microelectromechanical Systems, 32(4), 371 - 380.
MLA Wang,Chenxi,et al."A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor".Journal of Microelectromechanical Systems 32.4(2023):371 - 380.
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