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XU QINGSONG [1]
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2016 [1]
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IEEE Region 10 A... [1]
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Design of a new decoupled compliant xyz parallel-kinematic nanopositioning stage
Conference paper
Xiaozhi Zhang, Qingsong Xu. Design of a new decoupled compliant xyz parallel-kinematic nanopositioning stage[C], 2016.
Authors:
Xiaozhi Zhang
;
Qingsong Xu
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Submit date：2018/12/23
Decoupling
Fea Simulation
Flexure Hinges
Nanopositioning Stage
Vcms
