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Design of a new decoupled compliant xyz parallel-kinematic nanopositioning stage
Xiaozhi Zhang; Qingsong Xu
2016-01-05
Conference Name35th IEEE Region 10 Conference, TENCON 2015
Source PublicationIEEE Region 10 Annual International Conference, Proceedings/TENCON
Volume2016-January
Conference Date1-4 November 2015
Conference PlaceMacao
CountryChina
Abstract

In this paper, a new decoupled XYZ compliant parallel-kinematic nanopositioning stage is devised based on flexure mechanisms. It is driven by four voice coil motors (VCMs). The flexure stage can deliver the motion along X, Y and Z axes by controlling the four actuators for the positioning of biological cells in microinjection processes. In order to pick any cell in the field of view of the microscope, the output motion of the stage is expected to be over 1 mm. So, the VCMs are chosen. The compact flexure hinges are located in pairs to decouple the cross-axis motion, to guide the output of the actuator and to balance the torque along the center of the workspace. The method for driving in Z axis also makes a big difference as compared to existing work. The obtained FEA simulation results demonstrate the performance of the designed multi-axis nanopositioning stage.

KeywordDecoupling Fea Simulation Flexure Hinges Nanopositioning Stage Vcms
DOI10.1109/TENCON.2015.7372858
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic
WOS IDWOS:000380489200148
Scopus ID2-s2.0-84962136697
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Citation statistics
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXiaozhi Zhang; Qingsong Xu
AffiliationDepartment of Electromechanical Engineering, University of Macau, Macao
First Author AffilicationUniversity of Macau
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Xiaozhi Zhang,Qingsong Xu. Design of a new decoupled compliant xyz parallel-kinematic nanopositioning stage[C], 2016.
APA Xiaozhi Zhang., & Qingsong Xu (2016). Design of a new decoupled compliant xyz parallel-kinematic nanopositioning stage. IEEE Region 10 Annual International Conference, Proceedings/TENCON, 2016-January.
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