Residential College | false |
Status | 已發表Published |
Design of a new decoupled compliant xyz parallel-kinematic nanopositioning stage | |
Xiaozhi Zhang; Qingsong Xu | |
2016-01-05 | |
Conference Name | 35th IEEE Region 10 Conference, TENCON 2015 |
Source Publication | IEEE Region 10 Annual International Conference, Proceedings/TENCON |
Volume | 2016-January |
Conference Date | 1-4 November 2015 |
Conference Place | Macao |
Country | China |
Abstract | In this paper, a new decoupled XYZ compliant parallel-kinematic nanopositioning stage is devised based on flexure mechanisms. It is driven by four voice coil motors (VCMs). The flexure stage can deliver the motion along X, Y and Z axes by controlling the four actuators for the positioning of biological cells in microinjection processes. In order to pick any cell in the field of view of the microscope, the output motion of the stage is expected to be over 1 mm. So, the VCMs are chosen. The compact flexure hinges are located in pairs to decouple the cross-axis motion, to guide the output of the actuator and to balance the torque along the center of the workspace. The method for driving in Z axis also makes a big difference as compared to existing work. The obtained FEA simulation results demonstrate the performance of the designed multi-axis nanopositioning stage. |
Keyword | Decoupling Fea Simulation Flexure Hinges Nanopositioning Stage Vcms |
DOI | 10.1109/TENCON.2015.7372858 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS Research Area | Engineering |
WOS Subject | Engineering, Electrical & Electronic |
WOS ID | WOS:000380489200148 |
Scopus ID | 2-s2.0-84962136697 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xiaozhi Zhang; Qingsong Xu |
Affiliation | Department of Electromechanical Engineering, University of Macau, Macao |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Xiaozhi Zhang,Qingsong Xu. Design of a new decoupled compliant xyz parallel-kinematic nanopositioning stage[C], 2016. |
APA | Xiaozhi Zhang., & Qingsong Xu (2016). Design of a new decoupled compliant xyz parallel-kinematic nanopositioning stage. IEEE Region 10 Annual International Conference, Proceedings/TENCON, 2016-January. |
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