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Journal article [1]
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2002 [1]
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英語English [1]
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Thin Solid Films [1]
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Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction
Journal article
Ma C.-H., Huang J.-H., Chen H.. Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction[J]. Thin Solid Films, 2002, 418(2), 73-78.
Authors:
Ma C.-H.
;
Huang J.-H.
;
Chen H.
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Submit date：2019/04/08
Cos 2 α Sin 2 ψ Method
Residual Stress
Textured Thin Film
