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Design and Analysis of a Decoupled XY MEMS Microgripper with Integrated Dual-Axis Actuation and Force Sensing Conference paper
Yang S., Xu Q.. Design and Analysis of a Decoupled XY MEMS Microgripper with Integrated Dual-Axis Actuation and Force Sensing[C], 2017, 808-813.
Authors:  Yang S.;  Xu Q.
Favorite | TC[WOS]:7 TC[Scopus]:9 | Submit date:2018/12/23
2-dof Microgripper  2-pp Parallel Mechanism  Fea Simulation  Mems Gripper  Soimumps Fabrication Process