Residential College | false |
Status | 已發表Published |
Design and Analysis of a Decoupled XY MEMS Microgripper with Integrated Dual-Axis Actuation and Force Sensing | |
Yang S.; Xu Q. | |
2017-07-01 | |
Conference Name | 20th World Congress of the International-Federation-of-Automatic-Control (IFAC) |
Source Publication | IFAC-PapersOnLine |
Volume | 50 |
Issue | 1 |
Pages | 808-813 |
Conference Date | JUL 09-14, 2017 |
Conference Place | Toulouse, FRANCE |
Abstract | This paper presents the design, analysis, and simulation study of a novel micro-electromechanical system (MEMS) microgipper with two decoupled electrostatic actuators and two capacitive force sensors dedicated to the testing in compressive and shear directions of soft samples. The gripper mechanism is designed based on the two-prismatic-prismatic (2-PP) parallel structure and folded leaf flexure guiding mechanism. Owing to the design of decoupled actuation structure, the translations of the two gripping arms are parallel, which ensures the reaction force between two tips and grasped object in sole gripping direction. At the same time, this structure also offers a good decoupling property. The analytical model is verified by carrying out finite element analysis (FEA) simulation study, which confirms the feasibility and effectiveness of the proposed design. The fabrication procedure by SOIMUMPs process is also given, and the microgripper will be fabricated for future experimental study. |
Keyword | 2-dof Microgripper 2-pp Parallel Mechanism Fea Simulation Mems Gripper Soimumps Fabrication Process |
DOI | 10.1016/j.ifacol.2017.08.144 |
URL | View the original |
Indexed By | CPCI-S |
WOS Research Area | Automation & Control Systems |
WOS Subject | Automation & Control Systems |
WOS ID | WOS:000423845200132 |
Scopus ID | 2-s2.0-85031775642 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | Universidade de Macau |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Yang S.,Xu Q.. Design and Analysis of a Decoupled XY MEMS Microgripper with Integrated Dual-Axis Actuation and Force Sensing[C], 2017, 808-813. |
APA | Yang S.., & Xu Q. (2017). Design and Analysis of a Decoupled XY MEMS Microgripper with Integrated Dual-Axis Actuation and Force Sensing. IFAC-PapersOnLine, 50(1), 808-813. |
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