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Design and optimization of a long-stroke compliant micropositioning stage driven by voice coil motor Conference paper
Lin S., Jia Y., Lei I.P., Xu Q.. Design and optimization of a long-stroke compliant micropositioning stage driven by voice coil motor[C], 2012, 1716-1721.
Authors:  Lin S.;  Jia Y.;  Lei I.P.;  Xu Q.
Favorite | TC[WOS]:12 TC[Scopus]:15 | Submit date：2018/12/23
Flexure Mechanisms  Long-stroke  Micropositioning  Optimization  Single Axis  
A novel SOI-based single proof-mass 3-axis accelerometer with gap-closing differential capacitive electrodes in all sensing directions Conference paper
Hsu C.-P., Hsu Y.-C., Yip M.-C., Fang W.. A novel SOI-based single proof-mass 3-axis accelerometer with gap-closing differential capacitive electrodes in all sensing directions[C], 2010, 1188-1191.
Authors:  Hsu C.-P.;  Hsu Y.-C.;  Yip M.-C.;  Fang W.
Favorite | TC[WOS]:8 TC[Scopus]:8 | Submit date：2019/04/08
3-axis Accelerometer  Gap Closing Electrode  Single Proof-mass  Soi