Residential College | false |
Status | 已發表Published |
Design and optimization of a long-stroke compliant micropositioning stage driven by voice coil motor | |
Lin S.; Jia Y.; Lei I.P.; Xu Q. | |
2012-12-01 | |
Conference Name | 12th International Conference on Control, Automation, Robotics and Vision (ICARCV) |
Source Publication | 2012 12th International Conference on Control, Automation, Robotics and Vision, ICARCV 2012 |
Pages | 1716-1721 |
Conference Date | DEC 05-07, 2012 |
Conference Place | Guangzhou, PEOPLES R CHINA |
Abstract | A micro-/nanopositioning system with both large motion range and compact size is highly desired in various precision engineering applications. In this paper, the design of a new compliant micropositioning stage with translational motion is proposed based on flexure mechanisms. The stage parameters are optimized by using the genetic algorithm (GA) to achieve a large natural frequency under the constraints on motion range (i.e., over 10 mm) and compact physical dimension along with a high safety factor for the material. Both analytical calculations and simulations based on finite element analysis are performed to validate the stage performances. A physical prototype system which employs a voice coil motor and a laser displacement sensor for actuation and sensing, respectively, is fabricated for experimental tests. Result confirms the long-stroke performance of the developed micropositioning system. © 2012 IEEE. |
Keyword | Flexure Mechanisms Long-stroke Micropositioning Optimization Single Axis |
DOI | 10.1109/ICARCV.2012.6485408 |
URL | View the original |
Indexed By | SCIE |
WOS Research Area | Automation & Control Systems ; Engineering ; Robotics |
WOS Subject | Automation & Control Systems ; Engineering, Electrical & Electronic ; Robotics |
WOS ID | WOS:000317972500299 |
Scopus ID | 2-s2.0-84876016102 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | Universidade de Macau |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Lin S.,Jia Y.,Lei I.P.,et al. Design and optimization of a long-stroke compliant micropositioning stage driven by voice coil motor[C], 2012, 1716-1721. |
APA | Lin S.., Jia Y.., Lei I.P.., & Xu Q. (2012). Design and optimization of a long-stroke compliant micropositioning stage driven by voice coil motor. 2012 12th International Conference on Control, Automation, Robotics and Vision, ICARCV 2012, 1716-1721. |
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