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Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer Journal article
Binghao Liang, Wenjun Chen, Zhongfu He, Rongliang Yang, Zhiqiang Lin, Huiwei Du, Yuanyuan Shang, Anyuan Cao, Zikang Tang, Xuchun Gui. Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer[J]. SMALL, 2017, 13(44).
Authors:  Binghao Liang;  Wenjun Chen;  Zhongfu He;  Rongliang Yang;  Zhiqiang Lin; et al.
Favorite | TC[WOS]:54 TC[Scopus]:53  IF:13.0/13.5 | Submit date：2018/10/30
Carbon Nanotubes  Contact Resistance  Photoresist  Piezoresistive Pressure Sensor