Residential College | false |
Status | 已發表Published |
Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer | |
Binghao Liang1; Wenjun Chen1; Zhongfu He1; Rongliang Yang1; Zhiqiang Lin1; Huiwei Du1; Yuanyuan Shang2; Anyuan Cao3; Zikang Tang4; Xuchun Gui1 | |
2017-09-29 | |
Source Publication | SMALL |
ISSN | 1613-6810 |
Volume | 13Issue:44 |
Other Abstract | Pressure sensing is a crucial function for flexible and wearable electronics, such as artificial skin and health monitoring. Recent progress in material and device structure of pressure sensors has brought breakthroughs in flexibility, self-healing, and sensitivity. However, the fabrication process of many pressure sensors is too complicated and difficult to integrate with traditional silicon-based Micro-Electro-Mechanical System(MEMS). Here, this study demonstrates a scalable and integratable contact resistance-based pressure sensor based on a carbon nanotube conductive network and a photoresist insulation layer. The pressure sensors have high sensitivity (95.5 kPa−1), low sensing threshold (16 Pa), fast response speed (<16 ms), and zero power consumption when without loading pressure. The sensitivity, sensing threshold, and dynamic range are all tunable by conveniently modifying the hole diameter and thickness of insulation layer. |
Keyword | Carbon Nanotubes Contact Resistance Photoresist Piezoresistive Pressure Sensor |
DOI | 10.1002/smll.201702422 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics |
WOS Subject | Chemistry, Multidisciplinary ; Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter |
WOS ID | WOS:000416040600011 |
Publisher | WILEY-V C H VERLAG GMBH |
The Source to Article | WOS |
Scopus ID | 2-s2.0-85034839295 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | INSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING |
Corresponding Author | Zikang Tang; Xuchun Gui |
Affiliation | 1.State Key Lab of Optoelectronic Materials and Technologies School of Electronics and Information Technology Sun Yat-sen University Guangzhou 510275, P. R. China 2.School of Physical Engineering Zhengzhou University Zhengzhou, Henan 450052, China 3.Department of Materials Science and Engineering College of Engineering Peking University Beijing 100871, P. R. China 4.Institute of Applied Physics and Materials Engineering University of Macau Avenida da Universidade Taipa, Macau 999078, China |
Corresponding Author Affilication | INSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING |
Recommended Citation GB/T 7714 | Binghao Liang,Wenjun Chen,Zhongfu He,et al. Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer[J]. SMALL, 2017, 13(44). |
APA | Binghao Liang., Wenjun Chen., Zhongfu He., Rongliang Yang., Zhiqiang Lin., Huiwei Du., Yuanyuan Shang., Anyuan Cao., Zikang Tang., & Xuchun Gui (2017). Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer. SMALL, 13(44). |
MLA | Binghao Liang,et al."Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer".SMALL 13.44(2017). |
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