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Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer
Binghao Liang1; Wenjun Chen1; Zhongfu He1; Rongliang Yang1; Zhiqiang Lin1; Huiwei Du1; Yuanyuan Shang2; Anyuan Cao3; Zikang Tang4; Xuchun Gui1
2017-09-29
Source PublicationSMALL
ISSN1613-6810
Volume13Issue:44
Other Abstract

Pressure sensing is a crucial function for flexible and wearable electronics, such as artificial skin and health monitoring. Recent progress in material and device structure of pressure sensors has brought breakthroughs in flexibility, self-healing, and sensitivity. However, the fabrication process of many pressure sensors is too complicated and difficult to integrate with traditional silicon-based Micro-Electro-Mechanical System(MEMS). Here, this study demonstrates a scalable and integratable contact resistance-based pressure sensor based on a carbon nanotube conductive network and a photoresist insulation layer. The pressure sensors have high sensitivity (95.5 kPa−1), low sensing threshold (16 Pa), fast response speed (<16 ms), and zero power consumption when without loading pressure. The sensitivity, sensing threshold, and dynamic range are all tunable by conveniently modifying the hole diameter and thickness of insulation layer.

KeywordCarbon Nanotubes Contact Resistance Photoresist Piezoresistive Pressure Sensor
DOI10.1002/smll.201702422
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaChemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectChemistry, Multidisciplinary ; Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
WOS IDWOS:000416040600011
PublisherWILEY-V C H VERLAG GMBH
The Source to ArticleWOS
Scopus ID2-s2.0-85034839295
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Citation statistics
Document TypeJournal article
CollectionINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Corresponding AuthorZikang Tang; Xuchun Gui
Affiliation1.State Key Lab of Optoelectronic Materials and Technologies School of Electronics and Information Technology Sun Yat-sen University Guangzhou 510275, P. R. China
2.School of Physical Engineering Zhengzhou University Zhengzhou, Henan 450052, China
3.Department of Materials Science and Engineering College of Engineering Peking University Beijing 100871, P. R. China
4.Institute of Applied Physics and Materials Engineering University of Macau Avenida da Universidade Taipa, Macau 999078, China
Corresponding Author AffilicationINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Recommended Citation
GB/T 7714
Binghao Liang,Wenjun Chen,Zhongfu He,et al. Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer[J]. SMALL, 2017, 13(44).
APA Binghao Liang., Wenjun Chen., Zhongfu He., Rongliang Yang., Zhiqiang Lin., Huiwei Du., Yuanyuan Shang., Anyuan Cao., Zikang Tang., & Xuchun Gui (2017). Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer. SMALL, 13(44).
MLA Binghao Liang,et al."Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer".SMALL 13.44(2017).
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