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Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer Journal article
Li, Fangzheng, Liu, Dandan, Gao, Le, Cai, Bingyang, Yang, Lujia, Wang, Yuan, Zhao, Chun, Wu, Wenjie, Tu, Liangcheng. Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer[J]. Journal of Microelectromechanical Systems, 2024, 33(1), 12-20.
Authors:  Li, Fangzheng;  Liu, Dandan;  Gao, Le;  Cai, Bingyang;  Yang, Lujia; et al.
Favorite | TC[WOS]:0 TC[Scopus]:0  IF:2.5/2.6 | Submit date：2024/02/22
Area-changed Capacitor  Electrostatic Actuator  Force-balance  Low Noise  Mems Accelerometer  
Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor Journal article
Xu Q.. Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor[J]. IEEE Sensors Journal, 2015, 15(10), 6017-6026.
Authors:  Xu Q.
Favorite | TC[WOS]:75 TC[Scopus]:88  IF:4.3/4.2 | Submit date：2018/10/30
Capacitive Force Sensor  Compliant Mechanisms  Dual-axis Force Sensing  Electrostatic Actuator  Microelectromechanical Devices  
A dual-axis electrostatically driven MEMS microgripper Journal article
Jia Y., Jia M., Xu Q.. A dual-axis electrostatically driven MEMS microgripper[J]. International Journal of Advanced Robotic Systems, 2014, 11.
Authors:  Jia Y.;  Jia M.;  Xu Q.
Favorite | TC[WOS]:7 TC[Scopus]:8 | Submit date：2018/12/23
Capacitive Sensor  Electrostatic Actuator  Mems  Microgripper