Residential College | false |
Status | 已發表Published |
A dual-axis electrostatically driven MEMS microgripper | |
Jia Y.2; Jia M.1; Xu Q.2 | |
2014-11-24 | |
Source Publication | International Journal of Advanced Robotic Systems |
ISSN | 17298814 17298806 |
Volume | 11 |
Abstract | This paper presents the design of a new monolithic twoaxis electrostatically actuated MEMS microgripper with integrated capacitive position and force sensors working at the micro-scale level. Each of the two jaws of the microgripper possesses two degrees-of-freedom (DOF) and is capable of positioning in both x-and y-axes. Unlike existing works, where one gripper arm is actuated and other one is sensed, both arms of the proposed microgripper are actuated and sensed independently. A sensing scheme is constructed to provide the position and force signals in the noncontact and contact phases, respectively. By applying a 120V driving voltage, the jaw can provide 70 μm x-axis and 18 μm y-axis displacements with the force of 190 μN. By this design, the real-time position and grasping force information can be obtained in the dual sensing mode. Both analytical calculation and finite-element analysis (FEA) were performed to verify the performance of the proposed design. A scaled-up prototype is designed, fabricated and tested through the experiment to verify the structure design of the microgripper. |
Keyword | Capacitive Sensor Electrostatic Actuator Mems Microgripper |
DOI | 10.5772/59677 |
URL | View the original |
Indexed By | SCIE |
WOS Research Area | Robotics |
WOS Subject | Robotics |
WOS ID | WOS:000345850100001 |
Scopus ID | 2-s2.0-84914125497 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | 1.Southeast University 2.Universidade de Macau |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Jia Y.,Jia M.,Xu Q.. A dual-axis electrostatically driven MEMS microgripper[J]. International Journal of Advanced Robotic Systems, 2014, 11. |
APA | Jia Y.., Jia M.., & Xu Q. (2014). A dual-axis electrostatically driven MEMS microgripper. International Journal of Advanced Robotic Systems, 11. |
MLA | Jia Y.,et al."A dual-axis electrostatically driven MEMS microgripper".International Journal of Advanced Robotic Systems 11(2014). |
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