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2024 [1]
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英語English [1]
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IEEE Sensors Jou... [1]
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1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode
Journal article
Wang, Linlin, Wang, Chen, Quan, Aojie, Wang, Yuan, Wang, Chenxi, Kraft, Michael. 1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode[J]. IEEE Sensors Journal, 2024, 24(15), 23640 - 23648.
Authors:
Wang, Linlin
;
Wang, Chen
;
Quan, Aojie
;
Wang, Yuan
;
Wang, Chenxi
; et al.
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Submit date：2024/07/04
Contour Extensional Mode
Coupled Baw Mems Resonators
Mass Sensor
Mode Localization
Piezoelectric Transduction
