UM  > INSTITUTE OF MICROELECTRONICS
Residential Collegefalse
Status已發表Published
1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode
Wang, Linlin1; Wang, Chen1; Quan, Aojie1; Wang, Yuan2; Wang, Chenxi1; Kraft, Michael1
2024
Source PublicationIEEE Sensors Journal
ISSN1530-437X
Volume24Issue:15Pages:23640 - 23648
Abstract

Abstract-This paper conducts a comprehensive study on 1 and 2-degree-of-freedom (DoF) piezoelectric bulk acoustic wave (BAW) disk resonators operating in the contour extensional mode as mass sensors. Laser bombardment was utilized to remove well-defined quantities of silicon to introduce mass perturbations. The weak mechanical coupling in The 2-DoF BAW resonator system showed a mode localization effect with over two to three orders of magnitude enhancement in mass sensitivity (compared to 1 and 2-DoF resonant sensors with frequency shift as the output metric), using amplitude ratio (AR) as the output signal. Moreover, the experimental results matched well with finite element (FE) simulated results and theoretical computations. Compared with previously reported aerosol mass sensor based on 2-DoF wine-glass (WG) mode BAW resonators, the presented 2-DoF device achieved a 2.14 times better quality factor (Q) of ~3800 in air and ~147.71 (AR change) and 2.97 (frequency shift) times enhancement in mass resolution. Furthermore, this work affirms better stability using AR, with a comparable level to frequency shift. This alters the commonly deemed fact that AR is inferior to the frequency shift in terms of stability. Besides, the proposed devices demonstrated Q factors of ~128 for the 1-DoF device and ~219 for the 2-DoF device in liquid. In particular, the proposed 2-DoF resonators achieved a Q factor of ~375 when only one resonator and the coupling beam were immersed in tap water. For the first time, it is shown that coupled BAW resonators are able to work in liquid with reasonable Q factors.

KeywordContour Extensional Mode Coupled Baw Mems Resonators Mass Sensor Mode Localization Piezoelectric Transduction
DOI10.1109/JSEN.2024.3402101
URLView the original
Language英語English
Scopus ID2-s2.0-85195393862
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionINSTITUTE OF MICROELECTRONICS
Affiliation1.Department of Electrical Engineering ESAT, Micro and Nano Systems (MNS), KU Leuven, Leuven, Belgium
2.The Department of Physics, Institute of Microelectronics, the University of Macau, Colorado State University, Taipa, Macau, China
Recommended Citation
GB/T 7714
Wang, Linlin,Wang, Chen,Quan, Aojie,et al. 1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode[J]. IEEE Sensors Journal, 2024, 24(15), 23640 - 23648.
APA Wang, Linlin., Wang, Chen., Quan, Aojie., Wang, Yuan., Wang, Chenxi., & Kraft, Michael (2024). 1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode. IEEE Sensors Journal, 24(15), 23640 - 23648.
MLA Wang, Linlin,et al."1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode".IEEE Sensors Journal 24.15(2024):23640 - 23648.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Wang, Linlin]'s Articles
[Wang, Chen]'s Articles
[Quan, Aojie]'s Articles
Baidu academic
Similar articles in Baidu academic
[Wang, Linlin]'s Articles
[Wang, Chen]'s Articles
[Quan, Aojie]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Wang, Linlin]'s Articles
[Wang, Chen]'s Articles
[Quan, Aojie]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.