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INSTITUTE OF APP... [2]
Authors
WANG SHUANGPENG [1]
CAI YONGQING [1]
Document Type
Journal article [2]
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2024 [1]
2016 [1]
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英語English [2]
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Hongwai yu Jigua... [1]
Materials Today ... [1]
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Orbital hybridization and defective states of vacancy defects in AlN
Journal article
Yan, Xuefei, Wang, Bowen, Yan, Hejin, Huan, Changmeng, Cai, Yongqing, Ke, Qingqing. Orbital hybridization and defective states of vacancy defects in AlN[J]. Materials Today Communications, 2024, 39, 109063.
Authors:
Yan, Xuefei
;
Wang, Bowen
;
Yan, Hejin
;
Huan, Changmeng
;
Cai, Yongqing
; et al.
Favorite
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TC[WOS]:
0
TC[Scopus]:
1
IF:
3.7
/
3.8
|
Submit date:2024/05/16
Aluminum Nitride
Antibonding Coupling
First Principles
Orbital Hybridization
Vacancy
Effect of deposition temperature on the structural and surface properties of AlN by plasma enhanced atomic layer deposition
Journal article
Chen F., Fang X., Wang S., Niu S., Fang F., Fang D., Tang J., Wang X., Liu G., Wei Z.. Effect of deposition temperature on the structural and surface properties of AlN by plasma enhanced atomic layer deposition[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2016, 45(4).
Authors:
Chen F.
;
Fang X.
;
Wang S.
;
Niu S.
;
Fang F.
; et al.
Favorite
|
TC[Scopus]:
0
|
Submit date:2019/04/08
Aluminum Nitride
Crystallization
Deposition Temperature
Growth Rate
Plasma Enhanced Atomic Layer Deposition
Surface Roughness