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XU QINGSONG [1]
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2015 [1]
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2015 IEEE Intern... [1]
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Design of a new flexure-based XYZ parallel nanopositioning stage
Conference paper
Zhang X., Xu Q.. Design of a new flexure-based XYZ parallel nanopositioning stage[C], 2015, 1962-1966.
Authors:
Zhang X.
;
Xu Q.
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Submit date：2018/12/23
3-dof Nanopositioning Stage
Decoupling
Fea Simulation
Ppr Joint
Two-stacked Amplifier
