Residential College | false |
Status | 已發表Published |
Design of a new flexure-based XYZ parallel nanopositioning stage | |
Zhang X.; Xu Q. | |
2015 | |
Conference Name | IEEE International Conference on Robotics and Biomimetics (ROBIO) |
Source Publication | 2015 IEEE International Conference on Robotics and Biomimetics, IEEE-ROBIO 2015 |
Pages | 1962-1966 |
Conference Date | DEC 06-09, 2015 |
Conference Place | Zhuhai, PEOPLES R CHINA |
Abstract | This paper concentrates on the mechanism design of a new compact parallel flexure stage with three DOFs. First of all, a bridge-principle amplifier is proposed by a serial connection of two fundamental bridge amplifiers. Then, an analytical study of amplifiers in terms of two-stage amplifiers is conducted by performing finite-element analysis (FEA) simulations. Later, a PPR flexure joint is demonstrated to reduce the cross-axis error. Owing to a larger amplification ratio and flexures, the two-stage amplifier is then employed to devise an XYZ parallel stage with decoupled motion. Driven by three low-voltage piezoelectric stacks, the XYZ stage provides larger decoupled motions by using the two-stacked amplifiers, which directly connect the actuators and output platform with the PPR joints. The performance of the designed stage is verified by FEA simulation study. |
Keyword | 3-dof Nanopositioning Stage Decoupling Fea Simulation Ppr Joint Two-stacked Amplifier |
DOI | 10.1109/ROBIO.2015.7419060 |
URL | View the original |
Indexed By | SCIE |
WOS Research Area | Robotics |
WOS Subject | Robotics |
WOS ID | WOS:000380476200327 |
Scopus ID | 2-s2.0-84964502548 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | Universidade de Macau |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Zhang X.,Xu Q.. Design of a new flexure-based XYZ parallel nanopositioning stage[C], 2015, 1962-1966. |
APA | Zhang X.., & Xu Q. (2015). Design of a new flexure-based XYZ parallel nanopositioning stage. 2015 IEEE International Conference on Robotics and Biomimetics, IEEE-ROBIO 2015, 1962-1966. |
Files in This Item: | There are no files associated with this item. |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment