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Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation Journal article
Jingqian Xi, Lei Xu, Yuan Wang, Huafeng Liu, Xingyin Xiong, Xudong Zou, Chengxin Li, Fangjing Hu, Chen Wang, Michael Kraft, Chun Zhao. Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation[J]. Journal of Microelectromechanical Systems, 2023, 32(5), 426 - 436.
Authors:  Jingqian Xi;  Lei Xu;  Yuan Wang;  Huafeng Liu;  Xingyin Xiong; et al.
Adobe PDF | Favorite | TC[WOS]:6 TC[Scopus]:6  IF:2.5/2.6 | Submit date：2023/08/03
Blue-sideband Excitation  Cross-sensitivity Suppression  Micromechanical Devices  Multiple Parameter Decoupling  Resonant Frequency  Resonant Mems Sensors  Sensitivity  Sensors  Temperature Measurement  Temperature Sensors  Vibrations