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Investigation of Multipolar ECR Plasma Source Sensors and Models for Plasma Control Journal article
Mak, P. U., Tsai, M.-H., Natarajan, J., Wright, B., Grotjohn, T., Salam, F., Siegel, M., Asmussen, J.. Investigation of Multipolar ECR Plasma Source Sensors and Models for Plasma Control[J]. Journal of Vacuum Science & Technology A, 1996, 1894-1900.
Authors:  Mak, P. U.;  Tsai, M.-H.;  Natarajan, J.;  Wright, B.;  Grotjohn, T.; et al.
Favorite |   IF:2.4/2.6 | Submit date：2022/09/01
Sensors And Plasma Processing Control Model  
Investigation of the Influence of Electromagnetic Excitation on Electron Cyclotron Resonance Discharge Performance Journal article
Mak, P. U., King, G., Grotjohn, T., Asmussen, J.. Investigation of the Influence of Electromagnetic Excitation on Electron Cyclotron Resonance Discharge Performance[J]. Journal of Vacuum Science & Technology A, 1992, A10, 2181-2187.
Authors:  Mak, P. U.;  King, G.;  Grotjohn, T.;  Asmussen, J.
Favorite | TC[WOS]:22 TC[Scopus]:19  IF:2.4/2.6 | Submit date：2022/09/01
Ecr Plasma