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XU QINGSONG [1]
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2015 [1]
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英語English [1]
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2015 IEEE Intern... [1]
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Design and fabrication of a two-axis micro-motion machine for precision alignment
Conference paper
Law M.K., Chiang K.C., Xu Q.. Design and fabrication of a two-axis micro-motion machine for precision alignment[C], 2015, 958-963.
Authors:
Law M.K.
;
Chiang K.C.
;
Xu Q.
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Submit date：2018/12/23
Decoupling
Fea Simulation
Flexure Hinge
Precision Alignment
Xz Micropositioning Stage
