Residential College | false |
Status | 已發表Published |
Design and fabrication of a two-axis micro-motion machine for precision alignment | |
Law M.K.; Chiang K.C.; Xu Q. | |
2015-09-28 | |
Conference Name | 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics |
Source Publication | 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics |
Pages | 958-963 |
Conference Date | AUG 08-10, 2015 |
Conference Place | Yunnan |
Country | China |
Abstract | This paper presents the design, analysis, fabrication, and experimental testing of a two-axis micro-motion machine dedicated to precision alignment applications. The designed machine features a long alignment distance over ±5 mm in each axis and a well decoupling motion in the two axes. The design is devised using metal flexure mechanisms based on multistage leaf spring, which allows a precise movement without friction. Two voice coil motors are used to produce the two-axis motion. The flexure mechanism design is validated by finiteelement analysis (FEA) simulation study. Results confirm that the mechanism can provide over ±7 mm motion without failure in each axis. Moreover, a prototype machine is fabricated via EDM process. A series of experimental studies are performed on the prototype by using LabVIEW software. Experimented results demonstrate the satisfactory performance of the developed machine. |
Keyword | Decoupling Fea Simulation Flexure Hinge Precision Alignment Xz Micropositioning Stage |
DOI | 10.1109/ICInfA.2015.7279425 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Automation & Control Systems ; Engineering |
WOS Subject | Automation & Control Systems ; Engineering, Electrical & Electronic |
WOS ID | WOS:000380562200177 |
Scopus ID | 2-s2.0-84959913984 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | Department of Electromechanical Engineering, University of Macau, Faculty of Science and Technology, Avenida da Universidade, Taipa, Macao |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Law M.K.,Chiang K.C.,Xu Q.. Design and fabrication of a two-axis micro-motion machine for precision alignment[C], 2015, 958-963. |
APA | Law M.K.., Chiang K.C.., & Xu Q. (2015). Design and fabrication of a two-axis micro-motion machine for precision alignment. 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics, 958-963. |
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