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Design and fabrication of a two-axis micro-motion machine for precision alignment
Law M.K.; Chiang K.C.; Xu Q.
2015-09-28
Conference Name2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics
Source Publication2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics
Pages958-963
Conference DateAUG 08-10, 2015
Conference PlaceYunnan
CountryChina
Abstract

This paper presents the design, analysis, fabrication, and experimental testing of a two-axis micro-motion machine dedicated to precision alignment applications. The designed machine features a long alignment distance over ±5 mm in each axis and a well decoupling motion in the two axes. The design is devised using metal flexure mechanisms based on multistage leaf spring, which allows a precise movement without friction. Two voice coil motors are used to produce the two-axis motion. The flexure mechanism design is validated by finiteelement analysis (FEA) simulation study. Results confirm that the mechanism can provide over ±7 mm motion without failure in each axis. Moreover, a prototype machine is fabricated via EDM process. A series of experimental studies are performed on the prototype by using LabVIEW software. Experimented results demonstrate the satisfactory performance of the developed machine.

KeywordDecoupling Fea Simulation Flexure Hinge Precision Alignment Xz Micropositioning Stage
DOI10.1109/ICInfA.2015.7279425
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaAutomation & Control Systems ; Engineering
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic
WOS IDWOS:000380562200177
Scopus ID2-s2.0-84959913984
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Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXu Q.
AffiliationDepartment of Electromechanical Engineering, University of Macau, Faculty of Science and Technology, Avenida da Universidade, Taipa, Macao
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Law M.K.,Chiang K.C.,Xu Q.. Design and fabrication of a two-axis micro-motion machine for precision alignment[C], 2015, 958-963.
APA Law M.K.., Chiang K.C.., & Xu Q. (2015). Design and fabrication of a two-axis micro-motion machine for precision alignment. 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics, 958-963.
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