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Experimental investigation of the matching and impressed electric field of a multipolar electron cyclotron resonance discharge Journal article
Mak P., Asmussen J.. Experimental investigation of the matching and impressed electric field of a multipolar electron cyclotron resonance discharge[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1997, 15(1), 154-168.
Authors:  Mak P.;  Asmussen J.
Favorite | TC[WOS]:11 TC[Scopus]:12 | Submit date：2019/03/01
Investigation of Multipolar ECR Plasma Source Sensors and Models for Plasma Control Journal article
Mak, P. U., Tsai, M.-H., Natarajan, J., Wright, B., Grotjohn, T., Salam, F., Siegel, M., Asmussen, J.. Investigation of Multipolar ECR Plasma Source Sensors and Models for Plasma Control[J]. Journal of Vacuum Science & Technology A, 1996, 1894-1900.
Authors:  Mak, P. U.;  Tsai, M.-H.;  Natarajan, J.;  Wright, B.;  Grotjohn, T.; et al.
Favorite |   IF:2.4/2.6 | Submit date：2022/09/01
Sensors And Plasma Processing Control Model  
Investigation of the Influence of Electromagnetic Excitation on Electron Cyclotron Resonance Discharge Performance Journal article
Mak, P. U., King, G., Grotjohn, T., Asmussen, J.. Investigation of the Influence of Electromagnetic Excitation on Electron Cyclotron Resonance Discharge Performance[J]. Journal of Vacuum Science & Technology A, 1992, A10, 2181-2187.
Authors:  Mak, P. U.;  King, G.;  Grotjohn, T.;  Asmussen, J.
Favorite | TC[WOS]:22 TC[Scopus]:19  IF:2.4/2.6 | Submit date：2022/09/01
Ecr Plasma  
Ion and neutral energies in a multipolar electron cyclotron resonance plasma source Journal article
King G., Sze F.C., Mak P., Grotjohn T.A., Asmussen J.. Ion and neutral energies in a multipolar electron cyclotron resonance plasma source[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1992, 10(4), 1265-1269.
Authors:  King G.;  Sze F.C.;  Mak P.;  Grotjohn T.A.;  Asmussen J.
Favorite | TC[WOS]:35 TC[Scopus]:29 | Submit date：2019/03/01
Investigation of the influence of electromagnetic excitation on electron cyclotron resonance discharge properties Conference paper
Mak P., King G., Grotjohn T.A., Asmussen J.. Investigation of the influence of electromagnetic excitation on electron cyclotron resonance discharge properties[C], 1992, 1281-1287.
Authors:  Mak P.;  King G.;  Grotjohn T.A.;  Asmussen J.
Favorite | TC[WOS]:22 TC[Scopus]:19 | Submit date：2019/03/01