Residential College | false |
Status | 已發表Published |
Design and control of a novel electromagnetic actuated 3-DoFs micropositioner | |
Xiao, Xiao1; Xi, Ruidong2; Li, Yangmin3; Tang, Yirui4; Ding, Bingxiao5; Ren, Hongliang6; Meng, Max Q.H.1 | |
2021-10-01 | |
Source Publication | Microsystem Technologies |
ISSN | 0946-7076 |
Volume | 27Issue:10Pages:3763-3772 |
Abstract | In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved. |
DOI | 10.1007/s00542-020-05163-3 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
WOS Subject | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
WOS ID | WOS:000607032500001 |
Publisher | SPRINGER HEIDELBERG, TIERGARTENSTRASSE 17, D-69121 HEIDELBERG, GERMANY |
Scopus ID | 2-s2.0-85099336767 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING Faculty of Science and Technology INSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING |
Corresponding Author | Li, Yangmin; Meng, Max Q.H. |
Affiliation | 1.Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055, China 2.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macao 3.Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong 4.Institute of Applied Physics and Materials Engineering, University of Macau, Macao 5.Department of Mechanical Engineering, Jishou University, Jishou, 416000, China 6.Department of Biomedical Engineering, National University of Singapore, Singapore, 117580, Singapore |
Recommended Citation GB/T 7714 | Xiao, Xiao,Xi, Ruidong,Li, Yangmin,et al. Design and control of a novel electromagnetic actuated 3-DoFs micropositioner[J]. Microsystem Technologies, 2021, 27(10), 3763-3772. |
APA | Xiao, Xiao., Xi, Ruidong., Li, Yangmin., Tang, Yirui., Ding, Bingxiao., Ren, Hongliang., & Meng, Max Q.H. (2021). Design and control of a novel electromagnetic actuated 3-DoFs micropositioner. Microsystem Technologies, 27(10), 3763-3772. |
MLA | Xiao, Xiao,et al."Design and control of a novel electromagnetic actuated 3-DoFs micropositioner".Microsystem Technologies 27.10(2021):3763-3772. |
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