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Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation
Xu Q.1; Li Y.1; Xi N.2
2009
Source PublicationIEEE Transactions on Automation Science and Engineering
ISSN15455955
Volume6Issue:4Pages:710
Abstract

This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 μm × 260 μm with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 μm respectively, can be achieved by the micromanipulator. © 2006 IEEE.

KeywordFlexure Mechanism Micromanipulation Motion Control Parallel Mechanism Piezoelectric Actuation Visual Servoing
DOI10.1109/TASE.2009.2021980
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaAutomation & Control Systems
WOS SubjectAutomation & Control Systems
WOS IDWOS:000270035600013
The Source to ArticleScopus
Scopus ID2-s2.0-70350017971
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Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Affiliation1.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macao SAR, Chi
2.Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824-0590 U
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Xu Q.,Li Y.,Xi N.. Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation[J]. IEEE Transactions on Automation Science and Engineering, 2009, 6(4), 710.
APA Xu Q.., Li Y.., & Xi N. (2009). Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation. IEEE Transactions on Automation Science and Engineering, 6(4), 710.
MLA Xu Q.,et al."Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation".IEEE Transactions on Automation Science and Engineering 6.4(2009):710.
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