Residential College | false |
Status | 已發表Published |
Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation | |
Xu Q.1; Li Y.1; Xi N.2 | |
2009 | |
Source Publication | IEEE Transactions on Automation Science and Engineering |
ISSN | 15455955 |
Volume | 6Issue:4Pages:710 |
Abstract | This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 μm × 260 μm with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 μm respectively, can be achieved by the micromanipulator. © 2006 IEEE. |
Keyword | Flexure Mechanism Micromanipulation Motion Control Parallel Mechanism Piezoelectric Actuation Visual Servoing |
DOI | 10.1109/TASE.2009.2021980 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Automation & Control Systems |
WOS Subject | Automation & Control Systems |
WOS ID | WOS:000270035600013 |
The Source to Article | Scopus |
Scopus ID | 2-s2.0-70350017971 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Affiliation | 1.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macao SAR, Chi 2.Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824-0590 U |
First Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Xu Q.,Li Y.,Xi N.. Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation[J]. IEEE Transactions on Automation Science and Engineering, 2009, 6(4), 710. |
APA | Xu Q.., Li Y.., & Xi N. (2009). Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation. IEEE Transactions on Automation Science and Engineering, 6(4), 710. |
MLA | Xu Q.,et al."Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation".IEEE Transactions on Automation Science and Engineering 6.4(2009):710. |
Files in This Item: | There are no files associated with this item. |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment