Residential College | false |
Status | 已發表Published |
Design, testing and precision control of a novel long-stroke flexure micropositioning system | |
Xu Q. | |
2013 | |
Source Publication | Mechanism and Machine Theory |
ISSN | 0094-114X |
Volume | 70Pages:209-224 |
Abstract | This paper presents the design, modeling, analysis, testing and control of a novel compact long-stroke precision positioning stage. The stage is devised with leaf flexures to achieve a submicron-accuracy positioning with a stroke longer than 10 mm. Stage architectural parameters are designed to achieve the maximum natural frequency and then further improved to ensure a robust motion along the working axis. A voice coil motor and a laser displacement sensor are adopted for actuation and sensing of the fabricated stage, respectively. Both finite-element analysis and experimental tests confirm a motion range over 11 mm. To facilitate a rapid and precise positioning in front of nonlinear effects, a discrete-time sliding mode control (DSMC) algorithm based on a proportional-integral-derivative (PID) type of sliding function is devised. The DSMC guarantees the stability of the system in the presence of model uncertainties and disturbances. The effectiveness of the presented DSMC is verified through experimental studies. Results show that the DSMC is superior to PID algorithm in terms of both transient response speed and steady-state accuracy. |
Keyword | Finite-element Analysis Flexure Hinges Long Stroke Motion Control Optimum Design Sliding Mode Control |
DOI | 10.1016/j.mechmachtheory.2013.07.016 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering |
WOS Subject | Engineering, Mechanical |
WOS ID | WOS:000328011800014 |
Publisher | PERGAMON-ELSEVIER SCIENCE LTDTHE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND |
The Source to Article | Scopus |
Scopus ID | 2-s2.0-84882442235 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Av. Padre Tomas Pereira S.J., Taipa, Macao, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Xu Q.. Design, testing and precision control of a novel long-stroke flexure micropositioning system[J]. Mechanism and Machine Theory, 2013, 70, 209-224. |
APA | Xu Q..(2013). Design, testing and precision control of a novel long-stroke flexure micropositioning system. Mechanism and Machine Theory, 70, 209-224. |
MLA | Xu Q.."Design, testing and precision control of a novel long-stroke flexure micropositioning system".Mechanism and Machine Theory 70(2013):209-224. |
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