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Recent advances in the control of piezoelectric actuators
Chi,Ziqiang; Xu,Qingsong
2014-11-17
Source PublicationInternational Journal of Advanced Robotic Systems
ISSN1729-8806
Volume11
Abstract

This The micro/nano positioning field has made great progress towards enabling the advance of micro/nano technology. Micro/nano positioning stages actuated by piezoelectric actuators are the key devices in micro/nano manipulation. The control of piezoelectric actuators has emerged as a hot topic in recent years. Piezoelectric materials have inherent hysteresis and creep nonlinearity, which can reduce the accuracy of the manipulation, even causing the instability of the whole system. Remarkable efforts have been made to compensate for the nonlinearity of piezoelectric actuation through the mathematical modelling and control approaches. This paper provides a review of recent advances on the control of piezoelectric actuators. After a brief introduction of basic components of typical piezoelectric micro/nano positioning platforms, the working principle and modelling of piezoelectric actuators are outlined in this paper. This is followed with the major control method and recent progress is presented in detail. Finally, some open issues and future work on the control of piezoelectric actuators are extensively discussed.

KeywordControl Algorithm Dynamic Modelling Hysteresis Nonlinearity Micro/nano Positioning Stage Piezoelectric Actuator
DOI10.5772/59099
URLView the original
Language英語English
WOS IDWOS:000345848400001
Scopus ID2-s2.0-84914166041
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Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXu,Qingsong
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau,Taipa,Macao
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Chi,Ziqiang,Xu,Qingsong. Recent advances in the control of piezoelectric actuators[J]. International Journal of Advanced Robotic Systems, 2014, 11.
APA Chi,Ziqiang., & Xu,Qingsong (2014). Recent advances in the control of piezoelectric actuators. International Journal of Advanced Robotic Systems, 11.
MLA Chi,Ziqiang,et al."Recent advances in the control of piezoelectric actuators".International Journal of Advanced Robotic Systems 11(2014).
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