This chapter presents the rate-dependent hysteresis compensation of a piezoelectric nanopositioning stage using the feedforward control based on an inverse hysteresis model. Three different controllers are realized and compared, which employ Bouc–Wen model, modified Prandtl–Ishlinskii (MPI) model, and least squares support vector machines (LSSVM)-based intelligent model, respectively. Experimental studies demonstrate the superiority of LSSVM model in hysteresis modeling and compensation tasks.