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Design of a Flexure XY Micropositioning Stage with Large Hollow Platform
Hanlun Zhang; Zehao Wu; Qingsong Xu
2020-07-13
Conference Name2020 International Conference on Manipulation, Automation, and Robotics at Small Scales, MARSS 2020
Source PublicationProceedings of MARSS 2020: International Conference on Manipulation, Automation, and Robotics at Small Scales
Pages9307915
Conference Date13-17 July 2020
Conference PlaceToronto, ON, Canada
CountryCanada
PublisherIEEE
Abstract

This paper presents the design of a new flexure-based XY micropositioning stage with a large hollow platform, which is suitable for practical use with a microscope. The designed mechanism has a parallel-kinematic structure and is actuated by two voice coil motors. By employing multistage compound parallelogram flexures (MCPF), the stage is designed as a four-layer structure, which produces a motion output platform with a large hollow space and large motion range. Analytical modeling is carried out for the parametric design of the stage. Evaluation results show that the designed XY stage exhibits a large safety factor and high natural frequency. Moreover, the large hollow platform is well-suited for practical application with a microscope.

DOI10.1109/MARSS49294.2020.9307915
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering ; Instruments & Instrumentation
WOS SubjectEngineering, Mechanical ; Instruments & Instrumentation
WOS IDWOS:000580554800001
Scopus ID2-s2.0-85099568537
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Citation statistics
Document TypeConference paper
CollectionFaculty of Science and Technology
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
Affiliatione Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Hanlun Zhang,Zehao Wu,Qingsong Xu. Design of a Flexure XY Micropositioning Stage with Large Hollow Platform[C]:IEEE, 2020, 9307915.
APA Hanlun Zhang., Zehao Wu., & Qingsong Xu (2020). Design of a Flexure XY Micropositioning Stage with Large Hollow Platform. Proceedings of MARSS 2020: International Conference on Manipulation, Automation, and Robotics at Small Scales, 9307915.
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