Residential College | false |
Status | 已發表Published |
Design and control of a novel piezo-driven XY parallel nanopositioning stage | |
Zhang, Xiaozhi; Zhang, Yulong; Xu, Qingsong | |
2017-04 | |
Source Publication | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS |
ISSN | 0946-7076 |
Volume | 23Issue:4Pages:1067-1080 |
Abstract | This paper presents the mechanism and control design of a modular XY nanopositioning stage employing flexure mechanisms and piezoelectric actuators. A new compact parallel flexure stage with two translational degrees-of-freedom is presented. The dual-stacked bridge-type amplifier is employed by a serial connection of two amplifiers. Static and dynamic analytical modeling of the XY stage are carried out, which are verified by performing finite element analysis simulations. Owing to a larger amplification ratio of the bridge-type amplifier and acceptable decoupling property, the stage exhibits a nearly decoupled two-dimensional large motion. Moreover, the adaptive discrete sliding mode control scheme is devised to achieve precise positioning for the stage. The performance and effectiveness of this presented design are verified by several experimental studies. |
DOI | 10.1007/s00542-016-2854-y |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
WOS Subject | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
WOS ID | WOS:000397499300026 |
Publisher | SPRINGER |
The Source to Article | WOS |
Scopus ID | 2-s2.0-84957669238 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu, Qingsong |
Affiliation | Univ Macau, Fac Sci & Technol, Dept Electromech Engn, Ave Univ, Taipa, Macau, Peoples R China |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Zhang, Xiaozhi,Zhang, Yulong,Xu, Qingsong. Design and control of a novel piezo-driven XY parallel nanopositioning stage[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23(4), 1067-1080. |
APA | Zhang, Xiaozhi., Zhang, Yulong., & Xu, Qingsong (2017). Design and control of a novel piezo-driven XY parallel nanopositioning stage. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 23(4), 1067-1080. |
MLA | Zhang, Xiaozhi,et al."Design and control of a novel piezo-driven XY parallel nanopositioning stage".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 23.4(2017):1067-1080. |
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