Residential College | false |
Status | 已發表Published |
Recent Advances in the Control of Piezoelectric Actuator | |
Ziqiang Chi; Qingsong Xu | |
2014-11-17 | |
Source Publication | International Journal of Advanced Robotic Systems |
ISSN | 1729-8814 |
Volume | 11Issue:11 |
Abstract | The micro/nano positioning field has made great progress towards enabling the advance of micro/nano technology. Micro/nano positioning stages actuated by piezoelectric actuators are the key devices in micro/nano manipulation. The control of piezoelectric actuators has emerged as a hot topic in recent years. Piezoelectric materials have inherent hysteresis and creep nonlinearity, which can reduce the accuracy of the manipulation, even causing the instability of the whole system. Remarkable efforts have been made to compensate for the nonlinearity of piezoelectric actuation through the mathematical modelling and control approaches. This paper provides a review of recent advances on the control of piezoelectric actuators. After a brief introduction of basic components of typical piezoelectric micro/nano positioning platforms, the working principle and modelling of piezoelectric actuators are outlined in this paper. This is followed with the major control method and recent progress is presented in detail. Finally, some open issues and future work on the control of piezoelectric actuators are extensively discussed. |
Keyword | Piezoelectric Actuator Micro/nano Positioning Stage Hysteresis Nonlinearity Control Algorithm Dynamic Modelling |
DOI | 10.5772/59099 |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Robotics |
WOS Subject | Robotics |
WOS ID | WOS:000345848400001 |
Scopus ID | 2-s2.0-84914166041 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | Faculty of Science and Technology DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Qingsong Xu |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macau, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Ziqiang Chi,Qingsong Xu. Recent Advances in the Control of Piezoelectric Actuator[J]. International Journal of Advanced Robotic Systems, 2014, 11(11). |
APA | Ziqiang Chi., & Qingsong Xu (2014). Recent Advances in the Control of Piezoelectric Actuator. International Journal of Advanced Robotic Systems, 11(11). |
MLA | Ziqiang Chi,et al."Recent Advances in the Control of Piezoelectric Actuator".International Journal of Advanced Robotic Systems 11.11(2014). |
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