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Recent Advances in Piezoelectric Compliant Devices for Ultrahigh-Precision Engineering
Wu, Zeyi1; Wu, Zehao1; Chen, I. Ming2; Xu, Qingsong1
Source PublicationMicromachines
ISSN2072-666X
2024-12-01
Abstract

With advancements in small-scale research fields, precision manipulation has become crucial for interacting with small objects. As research progresses, the demand for higher precision in manipulation has led to the emergence of ultrahigh-precision engineering (UHPE), which exhibits significant potential for various applications. Traditional rigid-body manipulators suffer from issues like backlash and friction, limiting their effectiveness at smaller-scale applications. Smart materials, particularly piezoelectric materials, offer promising solutions with their rapid response and high resolution, making them ideal for creating efficient piezoelectric transducers. Meanwhile, compliant mechanisms, which use elastic deformation to transmit force and motion, eliminate inaccuracies induced by rigid-body mechanisms. Integrating piezoelectric transducers and compliant mechanisms into piezoelectric compliant devices enhances UHPE system performance. This paper reviews the recent advances in piezoelectric compliant devices. By focusing on the utilization of piezoelectric transducers and compliant mechanisms, their applications in perception, energy harvesting, and actuation have been surveyed, and future research suggestions are discussed.

KeywordCompliant Mechanisms Piezoelectric Compliant Device Piezoelectric Transducer Precision Engineering
Language英語English
DOI10.3390/mi15121456
URLView the original
Volume15
Issue12
Pages1456
WOS IDWOS:001384642400001
WOS SubjectChemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS Research AreaChemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
Indexed BySCIE
Scopus ID2-s2.0-85213286959
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Document TypeReview article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXu, Qingsong
Affiliation1.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macao
2.School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore, 639798, Singapore
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Wu, Zeyi,Wu, Zehao,Chen, I. Ming,et al. Recent Advances in Piezoelectric Compliant Devices for Ultrahigh-Precision Engineering[J]. Micromachines, 2024, 15(12), 1456.
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