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A Microforce Sensor Incorporating a Flexible Force-Sensitive Mechanism and Interferometric Displacement Measurement
Lyu, Zekui; Xu, Qingsong
2024-10-01
Source PublicationIEEE Sensors Journal
ISSN1530-437X
Volume24Issue:19Pages:29786-29794
Abstract

Measuring the deformation of an elastic element to obtain the exerted force is a typical design paradigm for force sensors. Even though the laser interferometric displacement measurement method has a lot of advantages, such as a large range, high accuracy, and non-contact, it is still seldom seen in the construction of microforce sensing systems. This paper presents the design of a uniaxial microforce sensor that integrates a flexible force-sensitive mechanism and a commercially available laser interferometer. Adopting commercial interferometric instruments has effectively improved the deformation monitoring performance and sensor development efficiency. The well-designed flexible force-sensitive mechanism based on multistage parallelogram mechanisms has an excellent linear force-deformation relationship, which has been verified by theoretical analysis, simulation investigation, and experimental testing. A prototype was fabricated and characterized in the laboratory. The force sensor demonstrated 1.66 N/mm sensitivity, 1.53% nonlinearity, 64.40 μN resolution, and 8.50 N range. Puncture experiments and palpation experiments confirmed its preliminary application potential. The work provides a new insight into the rapid development of high-performance force sensors.

KeywordCompliant Mechanism Displacement Sensor Flexible Mechanism Force Sensor Laser Interference
DOI10.1109/JSEN.2024.3443390
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering ; Instruments & Instrumentation ; Physics
WOS SubjectEngineering, Electrical & Electronic, Instruments & Instrumentation, Physics, Applied
WOS IDWOS:001329294500049
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141
Scopus ID2-s2.0-85201772489
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Citation statistics
Document TypeJournal article
CollectionFaculty of Science and Technology
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXu, Qingsong
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macau, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Lyu, Zekui,Xu, Qingsong. A Microforce Sensor Incorporating a Flexible Force-Sensitive Mechanism and Interferometric Displacement Measurement[J]. IEEE Sensors Journal, 2024, 24(19), 29786-29794.
APA Lyu, Zekui., & Xu, Qingsong (2024). A Microforce Sensor Incorporating a Flexible Force-Sensitive Mechanism and Interferometric Displacement Measurement. IEEE Sensors Journal, 24(19), 29786-29794.
MLA Lyu, Zekui,et al."A Microforce Sensor Incorporating a Flexible Force-Sensitive Mechanism and Interferometric Displacement Measurement".IEEE Sensors Journal 24.19(2024):29786-29794.
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