Residential College | false |
Status | 已發表Published |
A Microforce Sensor Incorporating a Flexible Force-Sensitive Mechanism and Interferometric Displacement Measurement | |
Lyu, Zekui; Xu, Qingsong | |
2024-10-01 | |
Source Publication | IEEE Sensors Journal |
ISSN | 1530-437X |
Volume | 24Issue:19Pages:29786-29794 |
Abstract | Measuring the deformation of an elastic element to obtain the exerted force is a typical design paradigm for force sensors. Even though the laser interferometric displacement measurement method has a lot of advantages, such as a large range, high accuracy, and non-contact, it is still seldom seen in the construction of microforce sensing systems. This paper presents the design of a uniaxial microforce sensor that integrates a flexible force-sensitive mechanism and a commercially available laser interferometer. Adopting commercial interferometric instruments has effectively improved the deformation monitoring performance and sensor development efficiency. The well-designed flexible force-sensitive mechanism based on multistage parallelogram mechanisms has an excellent linear force-deformation relationship, which has been verified by theoretical analysis, simulation investigation, and experimental testing. A prototype was fabricated and characterized in the laboratory. The force sensor demonstrated 1.66 N/mm sensitivity, 1.53% nonlinearity, 64.40 μN resolution, and 8.50 N range. Puncture experiments and palpation experiments confirmed its preliminary application potential. The work provides a new insight into the rapid development of high-performance force sensors. |
Keyword | Compliant Mechanism Displacement Sensor Flexible Mechanism Force Sensor Laser Interference |
DOI | 10.1109/JSEN.2024.3443390 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering ; Instruments & Instrumentation ; Physics |
WOS Subject | Engineering, Electrical & Electronic, Instruments & Instrumentation, Physics, Applied |
WOS ID | WOS:001329294500049 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 |
Scopus ID | 2-s2.0-85201772489 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | Faculty of Science and Technology DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu, Qingsong |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macau, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Lyu, Zekui,Xu, Qingsong. A Microforce Sensor Incorporating a Flexible Force-Sensitive Mechanism and Interferometric Displacement Measurement[J]. IEEE Sensors Journal, 2024, 24(19), 29786-29794. |
APA | Lyu, Zekui., & Xu, Qingsong (2024). A Microforce Sensor Incorporating a Flexible Force-Sensitive Mechanism and Interferometric Displacement Measurement. IEEE Sensors Journal, 24(19), 29786-29794. |
MLA | Lyu, Zekui,et al."A Microforce Sensor Incorporating a Flexible Force-Sensitive Mechanism and Interferometric Displacement Measurement".IEEE Sensors Journal 24.19(2024):29786-29794. |
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