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FlexDelta: A flexure-based fully decoupled parallel xyz positioning stage with a long stroke
Zhang, Qianjun1; Dong, Wei1; Xu, Qingsong2; Goteea, Bimal J.1; Gao, Yongzhuo1
2024-06
Source PublicationPRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
ISSN0141-6359
Volume88Pages:707-717
Abstract

Decoupled parallel xyz positioning stages with a large stroke are desired in high-speed and precise positioning applications. However, currently, such stages either have a short stroke or are unqualified in terms of the parasitic motion and coupling rate. In this paper, a novel flexure-based decoupled parallel xyz positioning stage (FlexDelta) is proposed and its conceptual design, modeling, and experimental investigation are conducted. First, the working principle of FlexDelta is introduced, followed by the design of its mechanism with flexure. Second, the stiffness model of flexure is established using matrix-based Castigliano's second theorem, and the influence of its lateral stiffness on the stiffness model of FlexDelta is comprehensively investigated and then optimally designed. Finally, experiments were conducted using the fabricated prototype. The results reveal that the positioning stage features a centimeter stroke in three axes, with a coupling rate of less than 0.53% and parasitic motion of less than 1.72 mrad over the full range. Its natural frequencies are 20.8 Hz, 20.8 Hz, and 22.4 Hz for the x, y, and z axis, respectively. Multi-axis path-tracking tests were also performed, which validated its dynamic performance with a micrometer error.

KeywordLong Stroke Positioning Stage Decoupled Xyz Flexure High Compactness
DOI10.1016/j.precisioneng.2024.04.019
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Instruments & Instrumentation
WOS SubjectEngineering, Multidisciplinary ; Engineering, Manufacturing ; Nanoscience & Nanotechnology ; Instruments & Instrumentation
WOS IDWOS:001237625400001
PublisherELSEVIER SCIENCE INC, STE 800, 230 PARK AVE, NEW YORK, NY 10169
Scopus ID2-s2.0-85191547422
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Citation statistics
Document TypeJournal article
CollectionFaculty of Science and Technology
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorGao, Yongzhuo
Affiliation1.State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin, 150000, China
2.Department of Electromechanical Engineering, University of Macau, 999078, China
Recommended Citation
GB/T 7714
Zhang, Qianjun,Dong, Wei,Xu, Qingsong,et al. FlexDelta: A flexure-based fully decoupled parallel xyz positioning stage with a long stroke[J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2024, 88, 707-717.
APA Zhang, Qianjun., Dong, Wei., Xu, Qingsong., Goteea, Bimal J.., & Gao, Yongzhuo (2024). FlexDelta: A flexure-based fully decoupled parallel xyz positioning stage with a long stroke. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 88, 707-717.
MLA Zhang, Qianjun,et al."FlexDelta: A flexure-based fully decoupled parallel xyz positioning stage with a long stroke".PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 88(2024):707-717.
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