Residential College | false |
Status | 已發表Published |
Design and Development of a Dual-Axis Force Sensing MEMS Microgripper | |
Yang, Sijie; Xu, Qingsong; Nan, Zhijie | |
2017-12 | |
Source Publication | JOURNAL OF MECHANISMS AND ROBOTICS-TRANSACTIONS OF THE ASME |
ISSN | 1942-4302 |
Volume | 9Issue:6 |
Abstract | This paper presents the design, simulation, fabrication, and testing processes of a new microelectromechanical systems (MEMS) microgripper, which integrates an electrostatic actuator and a capacitive force sensor. One advantage of the presented gripper is that the gripping force and interaction force in two orthogonal directions can be, respectively, detected by a single force sensor. The whole gripper structure consists of the left actuating part and right sensing part. It owns a simple structure and compact footprint. The actuator and sensor are fixed and linearly guided by four leaf flexures, respectively. The left arm of the gripper is driven through a lever amplification mechanism. By this structure, the displacement from the electrostatic actuator is transmitted and enlarged at the gripper tip. The right arm of the gripper is designed to detect the gripping and interaction forces using a capacitive sensor. The MEMS gripper is manufactured by SOIMUMPs process. The performance of the designed gripper is verified by conducting finite element analysis (FEA) simulation and experimental studies. Moreover, the demonstration of bio- cellulose gripping confirms the feasibility of the developed gripper device. |
DOI | 10.1115/1.4038010 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering ; Robotics |
WOS Subject | Engineering, Mechanical ; Robotics |
WOS ID | WOS:000414598900011 |
Publisher | ASME |
The Source to Article | WOS |
Scopus ID | 2-s2.0-85031009417 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu, Qingsong |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Yang, Sijie,Xu, Qingsong,Nan, Zhijie. Design and Development of a Dual-Axis Force Sensing MEMS Microgripper[J]. JOURNAL OF MECHANISMS AND ROBOTICS-TRANSACTIONS OF THE ASME, 2017, 9(6). |
APA | Yang, Sijie., Xu, Qingsong., & Nan, Zhijie (2017). Design and Development of a Dual-Axis Force Sensing MEMS Microgripper. JOURNAL OF MECHANISMS AND ROBOTICS-TRANSACTIONS OF THE ASME, 9(6). |
MLA | Yang, Sijie,et al."Design and Development of a Dual-Axis Force Sensing MEMS Microgripper".JOURNAL OF MECHANISMS AND ROBOTICS-TRANSACTIONS OF THE ASME 9.6(2017). |
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