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A 1.3-micrometre-thick elastic conductor for seamless on-skin and implantable sensors
Zhi Jiang1,2; Nuan Chen2; Zhigao Yi3; Junwen Zhong4,8; Feilong Zhang2; Shaobo Ji2; Rui Liao5; Yan Wang6; Haicheng Li2; Zhihua Liu7; Yang Wang5; Tomoyuki Yokota6; Xiaogang Liu3; Kenjiro Fukuda1,8; Xiaodong Chen2,7; Takao Someya1,6,8
2022-11-21
Source PublicationNature Electronics
ISSN2520-1131
Volume5Issue:11Pages:784-793
Abstract

On-skin and implantable electronics require elastic conductors that are only a few micrometres thick and soft enough to form a seamless contact with three-dimensional structures. However, fabricating thin conductors that are mechanically durable and have consistent electrical properties with stretching is challenging. Here we report polydimethylsiloxane (PDMS)–gold conductors that are around 1.3 µm thick and have a controlled morphology of microcracks in the gold film. The microcracks are formed by evaporating a 50-nm-thick gold film onto a 1.2-µm-thick PDMS film that is supported during fabrication by a 100-µm-thick PDMS film on glass; thermal expansion of the thick PDMS film causes the evaporated gold to form a microcracked structure on the thin PDMS. The resulting conductors can be stretched by up to 300% and remain highly conductive after strain release. We use them to create on-skin electrodes that are breathable and water resistant, and can continuously record electrocardiogram signals. We also use the conductors to create on-skin sensors with less than 3 µm thickness that can detect small mechanical forces and create implantable nerve electrodes that can provide signal recording and stimulation.

DOI10.1038/s41928-022-00868-x
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic
WOS IDWOS:000886183800007
EI Accession NumberNATURE PORTFOLIO, HEIDELBERGER PLATZ 3, BERLIN 14197, GERMANY
Scopus ID2-s2.0-85142296797
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionFaculty of Science and Technology
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorKenjiro Fukuda; Xiaodong Chen; Takao Someya
Affiliation1.Thin-Film Device Laboratory, RIKEN, Wako, Saitama, Japan
2.Innovative Center for Flexible Devices (iFLEX), School of Materials Science and Engineering, Nanyang Technological University, Singapore, Singapore
3.Department of Chemistry, National University of Singapore, Singapore, Singapore
4.Department of Electromechanical Engineering and Centre for Artificial Intelligence and Robotics, University of Macau, Macao
5.State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China (UESTC), Chengdu, China
6.Department of Electrical Engineering and Information Systems, The University of Tokyo, Tokyo, Japan
7.Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A*STAR), Singapore, Singapore
8.Center for Emergent Matter Science, RIKEN, Wako, Saitama, Japan
Recommended Citation
GB/T 7714
Zhi Jiang,Nuan Chen,Zhigao Yi,et al. A 1.3-micrometre-thick elastic conductor for seamless on-skin and implantable sensors[J]. Nature Electronics, 2022, 5(11), 784-793.
APA Zhi Jiang., Nuan Chen., Zhigao Yi., Junwen Zhong., Feilong Zhang., Shaobo Ji., Rui Liao., Yan Wang., Haicheng Li., Zhihua Liu., Yang Wang., Tomoyuki Yokota., Xiaogang Liu., Kenjiro Fukuda., Xiaodong Chen., & Takao Someya (2022). A 1.3-micrometre-thick elastic conductor for seamless on-skin and implantable sensors. Nature Electronics, 5(11), 784-793.
MLA Zhi Jiang,et al."A 1.3-micrometre-thick elastic conductor for seamless on-skin and implantable sensors".Nature Electronics 5.11(2022):784-793.
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