Design of a 5-DOF Flexure-Based Nanopositioning Stage

UM > Faculty of Science and Technology > DEPARTMENT OF ELECTROMECHANICAL ENGINEERING

Status	已發表Published
	Design of a 5-DOF Flexure-Based Nanopositioning Stage
	Zhang, X.; Xu, Q.
	2015-04-01
Source Publication	Proceedings of the 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2015)
Pages	276-280
Publisher	IEEE
Abstract	In this paper, the design of a new compliant five-axis parallel nanopositioning stage driven by PZT actuators is presented, which is based on flexure mechanism. The flexure stage contains two kinds of displacement amplifiers based on simple lever principle and bridge principle, respectively. The lever structure is designed to meet the requirement of the change of direction of the output displacement. The double-bridge amplifier can achieve the large displacement by overcoming the stroke limitation of the actuator. Each pair of actuators realizes the translational displacement in one axis and the rotation in one plane. The flexure stage with three pairs of actuators can obtain 5-DOF motion as the rotation in XY-plane is redundant. FEA simulation is conducted to verify the dimension of the designed stage. Results demonstrate the performance of the designed multi-axis nanopositioning stage.
Keyword	Nanopositioning flexure mechanism compliant mechanism piezoelectric actuation
Language	英語English
The Source to Article	PB_Publication
PUB ID	14131
Document Type	Conference paper
Collection	DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding Author	Xu, Q.
Recommended Citation GB/T 7714	Zhang, X.,Xu, Q.. Design of a 5-DOF Flexure-Based Nanopositioning Stage[C]:IEEE, 2015, 276-280.
APA	Zhang, X.., & Xu, Q. (2015). Design of a 5-DOF Flexure-Based Nanopositioning Stage. Proceedings of the 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2015), 276-280.

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