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XU QINGSONG [2]
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2016 [1]
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Design and Anlysis of an In-Plane Flexure XYZ Micro/Nano-Positioning Stage
Conference paper
Zhang, X., Xu, Q.. Design and Anlysis of an In-Plane Flexure XYZ Micro/Nano-Positioning Stage[C]:IEEE, 2016, 359-363.
Authors:
Zhang, X.
;
Xu, Q.
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Submit date：2022/08/15
Micro/Nano-Positioning
mechanism design
xyz stage
Mechanism design of a compact XYZ parallel flexure stage
Conference paper
Zhang X., Xu Q.. Mechanism design of a compact XYZ parallel flexure stage[C], 2015, 953-957.
Authors:
Zhang X.
;
Xu Q.
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TC[WOS]:
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TC[Scopus]:
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Submit date：2018/12/23
Decouple
Fea Simulation
Flexure Hinge
Two-stage Amplifier
Xyz Nano-positioning Stage
