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Conference paper [1]
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2015 [1]
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英語English [1]
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A CMOS capacitive vertical-parallel-plate-array humidity sensor with RF-aerogel fill-in for sensitivity and response time improvement
Conference paper
Chung V.P.J., Cheng C.-L., Yip M.-C., Fang W.. A CMOS capacitive vertical-parallel-plate-array humidity sensor with RF-aerogel fill-in for sensitivity and response time improvement[C], 2015, 767-770.
Authors:
Chung V.P.J.
;
Cheng C.-L.
;
Yip M.-C.
;
Fang W.
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Submit date：2019/04/08
Capacitive Sensor
Cmos Mems
Humidity Sensor
Rf-aerogel
Vertical-parallel-plate Array
