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An Improved Static Membrane Deflection Analysis for Collapse Mode CMUT Fabricated by Sacrificial Release Method
Journal article
Jiujiang Wang, Xin Liu, Yuanyu Yu, Ching-Hsiang Cheng, Kin Fong Lei, Peng Un Mak, Mang I Vai, Sio Hang Pun. An Improved Static Membrane Deflection Analysis for Collapse Mode CMUT Fabricated by Sacrificial Release Method[J]. IEEE Sensors Journal, 2023, 23(3), 2364-2374.
Authors:
Jiujiang Wang
;
Xin Liu
;
Yuanyu Yu
;
Ching-Hsiang Cheng
;
Kin Fong Lei
; et al.
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Submit date：2023/03/06
Analytical Analysis
Capacitive Micromachined Ultrasonic Transducer (Cmut)
Collapse Mode
Deflection
Substrate Supporting Effect
Supporting Post Bending Effect
