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Conference paper [1]
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2010 [1]
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英語English [1]
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Proceedings of I... [1]
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A novel SOI-based single proof-mass 3-axis accelerometer with gap-closing differential capacitive electrodes in all sensing directions
Conference paper
Hsu C.-P., Hsu Y.-C., Yip M.-C., Fang W.. A novel SOI-based single proof-mass 3-axis accelerometer with gap-closing differential capacitive electrodes in all sensing directions[C], 2010, 1188-1191.
Authors:
Hsu C.-P.
;
Hsu Y.-C.
;
Yip M.-C.
;
Fang W.
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Submit date：2019/04/08
3-axis Accelerometer
Gap Closing Electrode
Single Proof-mass
Soi
