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A CMOS capacitive vertical-parallel-plate-array humidity sensor with RF-aerogel fill-in for sensitivity and response time improvement Conference paper
Chung V.P.J., Cheng C.-L., Yip M.-C., Fang W.. A CMOS capacitive vertical-parallel-plate-array humidity sensor with RF-aerogel fill-in for sensitivity and response time improvement[C], 2015, 767-770.
Authors:  Chung V.P.J.;  Cheng C.-L.;  Yip M.-C.;  Fang W.
Favorite | TC[Scopus]:3 | Submit date：2019/04/08
Capacitive Sensor  Cmos Mems  Humidity Sensor  Rf-aerogel  Vertical-parallel-plate Array  
Development of a CMOS-MEMS RF-aerogel-based capacitive humidity sensor Conference paper
Chung V.P.J., Liang J.K.-C., Cheng C.-L., Yip M.-C., Fang W.. Development of a CMOS-MEMS RF-aerogel-based capacitive humidity sensor[C], 2014, 190-193.
Authors:  Chung V.P.J.;  Liang J.K.-C.;  Cheng C.-L.;  Yip M.-C.;  Fang W.
Favorite | TC[WOS]:0 TC[Scopus]:4 | Submit date：2019/04/08
Capacitive Transducer  Cmos Mems  Rf-aerogel Humidity Sensor