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Fabrication of CMUTs Using Sacrificial Release Process with Ashing Assisted Polysilicon Release
Conference paper
Che, U. Kin, Liu, Xin, Yu, Yuanyu, Wang, Jiujiang, Pun, Sio Hang, Chen, Fei, Mak, Peng Un, Vai, Mang I.. Fabrication of CMUTs Using Sacrificial Release Process with Ashing Assisted Polysilicon Release[C]. El-Hashash A.:SPIE, 2022, 1245807.
Authors:
Che, U. Kin
;
Liu, Xin
;
Yu, Yuanyu
;
Wang, Jiujiang
;
Pun, Sio Hang
; et al.
Favorite
|
TC[Scopus]:
0
|
Submit date:2023/01/30
Ashing
Capacitive Micromachined Ultrasonic Transducer
Polysilicon
Sacrificial Layer Release
Stress
Nested-Current-Mirror Rail-to-Rail-Output Single-Stage Amplifier with Enhancements of DC Gain, GBW and Slew Rate
Journal article
Zushu Yan, Pui-In Mak, Man-Kay Law, Rui P. Martins, Franco Maloberti. Nested-Current-Mirror Rail-to-Rail-Output Single-Stage Amplifier with Enhancements of DC Gain, GBW and Slew Rate[J]. IEEE Journal of Solid-State Circuits, 2015, 50(10), 2353-2366.
Authors:
Zushu Yan
;
Pui-In Mak
;
Man-Kay Law
;
Rui P. Martins
;
Franco Maloberti
Favorite
|
TC[WOS]:
61
TC[Scopus]:
67
|
Submit date:2019/02/11
Area Efficiency
Cmos
Current Mirror
Dc Gain
Differential-pair (Dp) Amplifier
Frequency Compensation
Gain-bandwidth Product (Gbw)
Low Temperature Polysilicon Lcd
Multi-stage Amplifier
Nested Current Mirror
Rail-to-rail Output Swing
Single-stage Amplifier
Slew Rate (Sr)
Stability