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XU QINGSONG [1]
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2018 [1]
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英語English [1]
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Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning
Journal article
Zeyi Wu, Qingsong Xu. Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning[J]. IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, 2018, 16(2), 908 - 918.
Authors:
Zeyi Wu
;
Qingsong Xu
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TC[WOS]:
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Submit date：2019/04/18
Compliant Mechanism
Flexure Stage
Mechanism Design
Micro/nanopositioning
Piezoelectric Actuator (Pea)
