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VAI MANG I [1]
PUN SIO HANG [1]
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Fabrication of embossed capacitive micromachined ultrasonic transducers using sacrificial release process
Journal article
Yu,Yuanyu, Wang,Jiujiang, Pun,Sio Hang, Cheng,Ching Hsiang, Lei,Kin Fong, Vai,Mang I., Zhang,Shuang, Mak,Peng Un. Fabrication of embossed capacitive micromachined ultrasonic transducers using sacrificial release process[J]. IEICE Electronics Express, 2019, 16(2).
Authors:
Yu,Yuanyu
;
Wang,Jiujiang
;
Pun,Sio Hang
;
Cheng,Ching Hsiang
;
Lei,Kin Fong
; et al.
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Submit date：2021/03/11
Embossed Capacitive Micromachined Ultrasonic Transducer
Nickel Electroplating
Sacrificial Release Process
