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Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer
Journal article
Li, Fangzheng, Liu, Dandan, Gao, Le, Cai, Bingyang, Yang, Lujia, Wang, Yuan, Zhao, Chun, Wu, Wenjie, Tu, Liangcheng. Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer[J]. Journal of Microelectromechanical Systems, 2024, 33(1), 12-20.
Authors:
Li, Fangzheng
;
Liu, Dandan
;
Gao, Le
;
Cai, Bingyang
;
Yang, Lujia
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
IF:
2.5
/
2.6
|
Submit date:2024/02/22
Area-changed Capacitor
Electrostatic Actuator
Force-balance
Low Noise
Mems Accelerometer
Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation
Conference paper
Xi, Jingqian, Xu, Jiao, Zhang, Ziqian, Uka, Erion, Liu, Huafeng, Chen, Jianlin, Wang, Chen, Kraft, Michael, Mak, Pui In, Wang, Yuan, Zhao, Chun. Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation[C]:IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2024.
Authors:
Xi, Jingqian
;
Xu, Jiao
;
Zhang, Ziqian
;
Uka, Erion
;
Liu, Huafeng
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
|
Submit date:2024/05/16
Blue-sideband Excitation
Modal Coupling
Phononic Frequency Comb
Resonant Mems Accelerometer
A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators
Conference paper
Wang, Chen, Quan, Aojie, Wang, Linlin, Esteves, Rui Amendoeira, Wang, Yuan, Madeira, Bernardo P., Guan, Yangyang, Wu, Xinyu, Kuznetsova, Nadezda, Shojaeian, Milad, Zhang, Pan, Mak, Pui In, Kraft, Michael. A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators[C], 2024, 903-906.
Authors:
Wang, Chen
;
Quan, Aojie
;
Wang, Linlin
;
Esteves, Rui Amendoeira
;
Wang, Yuan
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
|
Submit date:2024/05/16
Microelectromechanical System (Mems) Accelerometer
Piezoresistive Resonators
Quality (q) Factor
Thermal Actuation
Elevator absolute landing position sensor using infrared interrupter and MEMS accelerometer
Conference paper
Tou W.K., Vai M.I., Cheang S.U.. Elevator absolute landing position sensor using infrared interrupter and MEMS accelerometer[C], 2015, 366-370.
Authors:
Tou W.K.
;
Vai M.I.
;
Cheang S.U.
Favorite
|
TC[WOS]:
1
TC[Scopus]:
1
|
Submit date:2019/02/14
Elevator
Infrared Sensor
Kalman Filter
Linear Position Sensor
Mems Accelerometer
Re-leveling
A Robust Inclinometer System With Accurate Calibration of Tilt and Azimuth Angles
Journal article
Weibin Yang, Bin Fang, Yuan Yan Tang, Jiye Qian, Xudong Qin, Wenhua Yao. A Robust Inclinometer System With Accurate Calibration of Tilt and Azimuth Angles[J]. IEEE Sensors Journal, 2013, 13(6), 2313-2321.
Authors:
Weibin Yang
;
Bin Fang
;
Yuan Yan Tang
;
Jiye Qian
;
Xudong Qin
; et al.
Favorite
|
TC[WOS]:
19
TC[Scopus]:
22
IF:
4.3
/
4.2
|
Submit date:2019/02/11
Azimuth
Calibration
Fluxgate Sensor
Monaxial Microelectromechanical System (Mems) Accelerometer
Tilt