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Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications
Review article
2024
Authors:
Zheng, Zhuoyue
;
Wang, Chen
;
Wang, Linlin
;
Ji, Zeyu
;
Song, Xiaoxiao
; et al.
Favorite
|
TC[WOS]:
4
TC[Scopus]:
6
IF:
3.0
/
3.0
|
Submit date:2024/05/16
Capacitive Microphone
Directional Microphone
Environmental Noise-cancelling
Mems Microphone
Piezoelectric Microphone
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer
Journal article
Li, Fangzheng, Liu, Dandan, Gao, Le, Cai, Bingyang, Yang, Lujia, Wang, Yuan, Zhao, Chun, Wu, Wenjie, Tu, Liangcheng. Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer[J]. Journal of Microelectromechanical Systems, 2024, 33(1), 12-20.
Authors:
Li, Fangzheng
;
Liu, Dandan
;
Gao, Le
;
Cai, Bingyang
;
Yang, Lujia
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
IF:
2.5
/
2.6
|
Submit date:2024/02/22
Area-changed Capacitor
Electrostatic Actuator
Force-balance
Low Noise
Mems Accelerometer
Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation
Conference paper
Xi, Jingqian, Xu, Jiao, Zhang, Ziqian, Uka, Erion, Liu, Huafeng, Chen, Jianlin, Wang, Chen, Kraft, Michael, Mak, Pui In, Wang, Yuan, Zhao, Chun. Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation[C]:IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2024.
Authors:
Xi, Jingqian
;
Xu, Jiao
;
Zhang, Ziqian
;
Uka, Erion
;
Liu, Huafeng
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
|
Submit date:2024/05/16
Blue-sideband Excitation
Modal Coupling
Phononic Frequency Comb
Resonant Mems Accelerometer
1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode
Journal article
Wang, Linlin, Wang, Chen, Quan, Aojie, Wang, Yuan, Wang, Chenxi, Kraft, Michael. 1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode[J]. IEEE Sensors Journal, 2024, 24(15), 23640 - 23648.
Authors:
Wang, Linlin
;
Wang, Chen
;
Quan, Aojie
;
Wang, Yuan
;
Wang, Chenxi
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
IF:
4.3
/
4.2
|
Submit date:2024/07/04
Contour Extensional Mode
Coupled Baw Mems Resonators
Mass Sensor
Mode Localization
Piezoelectric Transduction
A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators
Conference paper
Wang, Chen, Quan, Aojie, Wang, Linlin, Esteves, Rui Amendoeira, Wang, Yuan, Madeira, Bernardo P., Guan, Yangyang, Wu, Xinyu, Kuznetsova, Nadezda, Shojaeian, Milad, Zhang, Pan, Mak, Pui In, Kraft, Michael. A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators[C], 2024, 903-906.
Authors:
Wang, Chen
;
Quan, Aojie
;
Wang, Linlin
;
Esteves, Rui Amendoeira
;
Wang, Yuan
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
|
Submit date:2024/05/16
Microelectromechanical System (Mems) Accelerometer
Piezoresistive Resonators
Quality (q) Factor
Thermal Actuation
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation
Journal article
Jingqian Xi, Lei Xu, Yuan Wang, Huafeng Liu, Xingyin Xiong, Xudong Zou, Chengxin Li, Fangjing Hu, Chen Wang, Michael Kraft, Chun Zhao. Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation[J]. Journal of Microelectromechanical Systems, 2023, 32(5), 426 - 436.
Authors:
Jingqian Xi
;
Lei Xu
;
Yuan Wang
;
Huafeng Liu
;
Xingyin Xiong
; et al.
Adobe PDF
|
Favorite
|
TC[WOS]:
6
TC[Scopus]:
6
IF:
2.5
/
2.6
|
Submit date:2023/08/03
Blue-sideband Excitation
Cross-sensitivity Suppression
Micromechanical Devices
Multiple Parameter Decoupling
Resonant Frequency
Resonant Mems Sensors
Sensitivity
Sensors
Temperature Measurement
Temperature Sensors
Vibrations
Optimization of MEMS Vibration Energy Harvester with Perforated Electrode
Journal article
Luo, Anxin, Zhang, Yulong, Guo, Xinge, Lu, Yan, Lee, Chengkuo, Wang, Fei. Optimization of MEMS Vibration Energy Harvester with Perforated Electrode[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021, 30(2), 299-308.
Authors:
Luo, Anxin
;
Zhang, Yulong
;
Guo, Xinge
;
Lu, Yan
;
Lee, Chengkuo
; et al.
Favorite
|
TC[WOS]:
14
TC[Scopus]:
17
IF:
2.5
/
2.6
|
Submit date:2021/12/07
Air Damping
Energy Harvesting
Microelectromechanical Systems (Mems)
Perforated Electrode
Handheld Total Chemical and Biological Analysis Systems: Bridging NMR, Digital Microfluidics, and Semiconductors
Book
Ka-Meng Lei, Pui-In Mak, Man-Kay Law, Rui Paulo Martins. Handheld Total Chemical and Biological Analysis Systems: Bridging NMR, Digital Microfluidics, and Semiconductors[M]. USA:Springer Press, 2017.
Authors:
Ka-Meng Lei
;
Pui-In Mak
;
Man-Kay Law
;
Rui Paulo Martins
Favorite
|
TC[Scopus]:
1
|
Submit date:2019/02/25
Smart Sensor Systems Cmos biomicroSystems
Biomedical Cmos Ics
Bio Mems
Bio/cmos
A review on actuation and sensing techniques for MEMS-based microgrippers
Journal article
Yang,Sijie, Xu,Qingsong. A review on actuation and sensing techniques for MEMS-based microgrippers[J]. Journal of Micro-Bio Robotics, 2017, 13(1-4).
Authors:
Yang,Sijie
;
Xu,Qingsong
Favorite
|
TC[WOS]:
106
TC[Scopus]:
114
IF:
1.6
/
1.5
|
Submit date:2021/03/09
Actuator
Microelectromechanical System (Mems)
Microgripper
Sensor
A Review on Actuation and Sensing Techniques for MEMS-based Microgrippers
Journal article
Sijie Yang, Qingsong Xu. A Review on Actuation and Sensing Techniques for MEMS-based Microgrippers[J]. Journal of Micro-Bio Robotics, 2017, 13(1-4), 1–14.
Authors:
Sijie Yang
;
Qingsong Xu
Favorite
|
TC[WOS]:
106
TC[Scopus]:
114
IF:
1.6
/
1.5
|
Submit date:2019/04/18
Microelectromechanical System (Mems)
Actuator
Sensor
Microgripper